The RUTA pump systems described here are vacuum pump systems consisting of Roots vacuum pumps from the RUVAC series in combination with a fore vacuum pump. They have been designed for rough and medium vacuum operation, i.e. for the pressure range from atmospheric pressure down to 10-4 mbar (7.5• 10-5 Torr). On the intake side RUTA pump systems consist of Roots vacuum pumps. Further compression to atmospheric pressure may be performed either by oil-sealed or dry compressing vacuum pumps or Roots vacuum pumps with pre-inlet cooling.
技术参数
规格项 | 参数值 |
---|---|
真空度范围 | 750 to 1.50E-9 torr (0.3825 to 29.92 in Hg vac) |
测量介质 | Gas |
产品类别 | Vacuum Gauges and Instruments |