特性

• 适用于高真空:不锈钢阀体
• 耐腐蚀:也可配置聚四氟乙烯阀体的型号
• 符合RoHS。
• 抗蚀剂分布均匀
• 防止雾气的二次沉积
• 防止危险蒸汽扩散。
• 通过无铅认证。

The EC-5000 series exhaust pressure controller can maintain a consistent pressure, of the user’s choice, within the chamber. The high-resolution stepper motor and unique butterfly valve ensure a fast, sensitive response to any pressure changes.","Benefits:","When the exhaust flow rate is adjusted to optimal levels:","There is less change in sensitivity caused by the accumulation of resist and other contamination compared with flow rate sensor control and the influence of turbulence and other noise is eliminated which enables superior, stable, responsive control.

技术参数