Digital high-end pyrometer for non-contact temperature measurement of silicon wafers from 350 °C.","The IS 12-Si is a special version of the IS 12, developed for the temperature measurement of silicon wafers.","The pyrometer is equipped with a optical narrow band filter in the near infrared. This enables a reliable measurement of thin silicon from 350°C which otherwise is transparent for infrared radiation. In this special spectral range the emissivity of silicon is 67% and it is almost independent from temperatures. This allows the IS 12-Si to detect the correct temperature of the silicon wafer.","In the beginning of the temperature range the IS 12-Si is sensitive against light. The sensitivity decreases with increasing temperature. In applications which require the low temperatures at the beginning of the range this effect can be avoided by screening against the light.

特性

• 用于硅片的测量
• 4 Temperature ranges between 350 and 1800 °C
• 光谱范围：近红外的窄带，特别是硅的测量
• 6个固定光学元件和3个可聚焦光学元件
• 响应时间为10ms，可调至10s
• 用于测量硅晶圆片

技术参数