特性

• 可重新密封的金属对金属外部密封结构（无环）
• 电抛光润湿零件
• 洁净室组装
• 多气体/多量程功能
• Analog and digital I/O, with optionally integrated interface to DeviceNetTM, Profibus-DP®, Modbus-RTU or FLOW-BUS
• 超稳定调零（不需要自动调零电路）
• 高精度、重复性好
• 多气/多范围功能

Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst High-Tech are characterized by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1\/4\" face seal male (VCR) or down port process connections.","lowest range 0,1...5 mln\/min.highest range 0,6... 100 ln\/min.","Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW® design features Multi Gas \/ Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides free and easy to use configuration software.","Features:

技术参数