Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst High-Tech are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1\/4\" face seal male (VCR) or downport process connections.","lowest range 0,1...5 mln\/min.highest range 0,6... 100 ln\/min.","Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW® design features Multi Gas \/ Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides free and easy to use configuration software.","Features:
特性
- 可重新密封的金属对金属外部密封结构（无环）
- 电抛光润湿零件
- 洁净室组装
- 多气/多范围功能
- Analog and digital I/O, with optionally integrated interface to DeviceNetTM, Profibus-DP®, Modbus-RTU or FLOW-BUS
- 超稳定零(无需自动零电路)
- 高精度和重复性
- 超稳定调零（不需要自动调零电路）
- 高精度、重复性好
技术参数
| 规格项 | 参数值 |
|---|---|
| 安装 | In-line |
| 测量技术 | Thermal |
| 产品标准 | RoHS |
| 产品类别 | Mass Flow Meters and Controllers |
| 电气输出 | Analog Current; Voltage |
| 前面板接口 | Computer Controllable |
| 质量流量 | 5.51E-7 to 0.1376 lbs/min (1.50E-8 to 0.0037 metric tons/hr) |
| 仪表形式 | Mass Flow Meter; Volumetric Flow Meter |
| 终端配件 | Compression |
| 特征 | Controller; Recorder / Totalizer Functions |
| 工作压力 | 0.0 to 14504 psi (0.0 to 10207 m H2O) |
| 气体体积流量 | 7.06E-6 to 1.77 SCFM (1.20E-5 to 3 m³/hr) |
| 介质类型 | Gas |
| 接口选项 | Serial / Digital;Network / Fieldbus |
| 工作温度 | 14 to 122 F (-10 to 50 C) |
| 介质温度 | 32 to 158 F (0 to 70 C) |
| 显示 | Digital (optional feature) |
