MF5000 series mass flow meters are specially designed for small pipe flow monitor and control. This series can measure gas flow in a pipe diameter as small as 0.5 mm, but not over 19 mm. Thanks to the self-flow conditioning feature of the MEMS sensors, the meters features an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally (1.5+0.2FS%) or better depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 2.5 MPa. Applications include semiconductor gas process monitor and control, hospital oxygen gas monitor, etc.
技术参数
| 规格项 | 参数值 |
|---|---|
| 工作压力 | 435 psi (306 m H2O) |
| 终端配件 | In-line Threaded |
| 仪表形式 | Mass Flow Meter |
| 显示 | Digital |
| 精度 | 1.5 ±% |
| 管道直径 | 0.12 inch (3 mm) |
| 安装 | In-line |
| 介质类型 | Gas |
| 产品类别 | Mass Flow Meters and Controllers |
| 接口选项 | Serial / Digital |
| 工作温度 | -4 to 149 F (-20 to 65 C) |
| 测量技术 | MEMS Flow Sensor |
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