MF5000 series mass flow meters are specially designed for small pipe flow monitor and control. This series can measure gas flow in a pipe diameter as small as 0.5 mm, but not over 19 mm. Thanks to the self-flow conditioning feature of the MEMS sensors, the meters features an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally (1.5+0.2FS%) or better depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 2.5 MPa. Applications include semiconductor gas process monitor and control, hospital oxygen gas monitor, etc.

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