Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst High-Tech are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1\/4\" face seal male (VCR) or downport process connections.","lowest range 0,1...5 mln\/min.highest range 0,6... 100 ln\/min.","Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW® design features Multi Gas \/ Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides free and easy to use configuration software.","Features:
特性
- 可重新密封的金属对金属外部密封结构（无环）
- 电抛光润湿零件
- 洁净室组装
- 多气/多范围功能
- Analog and digital I/O, with optionally integrated interface to DeviceNetTM, Profibus-DP®, Modbus-RTU or FLOW-BUS
- 超稳定零(无需自动零电路)
- 高精度和重复性
- 用电解法抛光接触液体的部件
技术参数
| 规格项 | 参数值 |
|---|---|
| 质量流量 | 2.75E-7 to 0.1376 lbs/min (7.49E-9 to 0.0037 metric tons/hr) |
| 气体体积流量 | 3.53E-6 to 1.77 SCFM (6.00E-6 to 3 m³/hr) |
| 前面板接口 | Computer Controllable |
| 工作温度 | 14 to 122 F (-10 to 50 C) |
| 仪表类型 | Mass Flow Meter; Volumetric Flow Meter |
| 测量技术 | Thermal |
| 工作压力 | 0.0 to 14504 psi (0.0 to 10207 m H2O) |
| 安装 | In-line |
| 产品类别 | Flow Meters |
| 显示 | Digital (optional feature) |
| 特征 | Controller (optional feature); Recorder / Totalizer Functions |
| 测量介质 | Gas |
| 介质温度 | 0 to 70 F (-18 to 21 C) |
| 接口选项 | Serial/Digital; Network/Fieldbus |
| 电气输出 | Current; Voltage |
| 产品标准 | RoHS |
| 终端配件 | Compression; In-line Threaded (optional feature) |
