Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5\", as for instance specified in the NeSSITM system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst High-Tech has developed the IQ+FLOW® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75\", thereby realizing the ultra compact flow and pressure controllers.","High intrinsic quality, featuring...","Customer specific designs","Based on the micro system technology of IQ+FLOW® series, Bronkhorst High-Tech also offers the possibility to combine functional modules on a compact manifold. See IQ+FLOW manifold solutions","Analytical applications:","Examples of analytical applications based on the ultra compact modules with a footprint of 0.75\" are:
技术参数
| 规格项 | 参数值 |
|---|---|
| 产品标准 | RoHS |
| 测量技术 | Thermal |
| 工作压力 | 0.0 to 2176 psi (0.0 to 1531 m H2O) |
| 介质温度 | 32 to 158 F (0 to 70 C) |
| 安装 | In-line |
| 终端配件 | Compression; In-line Threaded (optional feature) |
| 电气输出 | Current; Voltage |
| 气体体积流量 | 7.06E-6 to 0.1766 SCFM (1.20E-5 to 0.3001 m³/hr) |
| 产品类别 | Flow Meters |
| 测量介质 | Gas |
| 质量流量 | 5.51E-7 to 0.0138 lbs/min (1.50E-8 to 3.75E-4 metric tons/hr) |
| 仪表类型 | Mass Flow Meter; Volumetric Flow Meter |
| 前面板接口 | Computer Controllable |
| 接口选项 | Serial/Digital; Network/Fieldbus |
| 显示 | Digital (optional feature) |
| 工作温度 | 41 to 122 F (5 to 50 C) |
| 特征 | Controller; Recorder / Totalizer Functions |
