SI-F Series Spectral Interference Displacement MeterThe SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the smallest defects or changes in position. The fiber type sensor heads are as small as 2mm in diameter and generate no heat and are not influenced by electromagnetic noise for maximum flexibility. Common Applications:• Wafer Thickness• Glass Thickness• Surface Mapping• Stage Positioning• Precision Roller Runout• Warpage\/Flatness
技术参数
| 规格项 | 参数值 |
|---|---|
| 接收器 | Other Receiver |
| 产品类别 | Optical Triangulation Position Sensors |
| 测量范围 | 3.15 to 3.19 inch (80.01 to 81.03 mm) |
| 工作温度 | 32 to 122 F (0.0 to 50 C) |
| 接口 | Serial; Parallel |
| 激光安全 | Class 1/1M |
| 采样频率 | 5 kHz |
| 输出 | Voltage; Current; Switched / Alarm |
| 扫描区域 | Point or 1-Dimentional |
| 光源 | LED |
